名稱：蘇州賽森電子科技有限公司

電話：0512-58987901

傳真：0512-58987201

郵箱：sales@cycas.com

地址：江蘇省張家港經濟開發區福新路1202號 215600PRC

網址：www.vishang.com

Name: Suzhou cycas Microelectronics Co., Ltd.

Tel.: 0512-58987901

Fax: 0512-58987201

Email: sales@cycas.com

Address: No.1202,Fuxin Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC

Website: www.vishang.com

常熟P5000CVD

詳細介紹

P5000 configuration information：

1.Main body with 2 chambers

2.Control rack

3.RF rack with 3 ENI OEM-12B generator

4.ATMI UniChem 3200 TEOS cabinet

5.2x AMAT heat exchangers

6.1x Neslab HX-150 Heat exchanger

7.PLIS

8.Turbo pump with controller

9.cables

所屬分類：常熟化學氣相沉積chemical vapor deposition